Samsung Electronics Co., Ltd.

Soodoo Chae

Myoungbum Lee

JinGyun Kim

Hansoo Kim

Siyoung Choi

Hoosung Cho

HuiChang Moon

Kihyun Kim

Kihyun Hwang

Hanmei Choi

SeungHyun Lim

Seungmok Shin

A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.

Nonvolatile memory device and method for fabricating the same

A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, and a plurality of gate electrodes. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicular to the semiconductor substrate. The gate electrodes include a first gate electrode and a second gate electrode. The first gate electrode is disposed on the memory cell region to intersect the active pillars. The second gate electrode is disposed on the contact region, connected to the first gate electrode and comprising metal material.

Three-dimensional nonvolatile memory device

Nonvolatile memory devices include a vertical stack of nonvolatile memory cells. The vertical stack of nonvolatile memory cells includes a first nonvolatile memory cell having a first gate pattern therein, which is separated from a vertical active region by a first multi-layered dielectric pattern having a first thickness, and a second nonvolatile memory cell having a second gate pattern therein, which is separated from the vertical active region by a second multi-layered dielectric pattern having a second thickness. The second gate pattern is also separated from the first gate pattern by a distance less than a sum of the first and second thicknesses.

Three dimensional semiconductor memory devices and methods of manufacturing the same

Provided is a method of forming a nonvolatile memory device. The method may include alternatingly stacking n number of dielectric layers and n number of conductive layers on a substrate, forming a non-photosensitive pattern on the alternatingly stacked dielectric layers and conductive layers, etching the i-th conductive layer and i-th dielectric (2&#x2266;i&#x2266;n, i is a natural number indicating a stacking order of the conductive layers and the dielectric layers) by using the non-photosensitive pattern as an etch mask, laterally etching a sidewall of the non-photosensitive pattern and etching the i-th conductive layer, (i&#x2212;1)-th conductive layer, i-th dielectric layer and (i&#x2212;1)-th dielectric layer by using the etched non-photosensitive pattern as an etch mask.

Method of forming nonvolatile memory device

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Seongnam-si, South Korea

Soodoo Chae