Samsung Electronics Co., Ltd.

Soo-Won Lee

Jin-Soo Kim

Hong-Sick Park

Jin-Ho Ju

Sung-Chul Kang

Bong-Woo Lee

Sung-Joon Byun

Jung-Taek Lim

Soo-Im Jeong

Sho-Hak Nam

An etching system and method. In the method, layers are etched on a plurality of substrates using a single amount of etchant to form a predetermined pattern on each of the layers, wherein an etching period varies according to an accumulated process number of substrates. The system includes an etching equipment including an etching processor for etching layers on a plurality of substrates using a single amount of etchant to form a predetermined pattern on each of the layers, and a loader for temporarily holding cassettes in which the substrates are stored; and a controller for controlling operations of the etching equipment. The etching equipment changes an etching period according to an accumulated process number of the substrates.

Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner

The present invention relates to a method for recycling an alignment layer material. The recycled alignment layer material shows the same characteristics as an original alignment layer material. The waste solution of the alignment layer material produced during the liquid crystal display manufacturing processes is recycled by solidifying polyamic acids and soluble polyimides by putting a waste solution of the alignment layer material into an organic solution or ultra purified water in which the alignment layer material constituents of polyamic acids and soluble polyimides are insoluble, separating polyamic acids and soluble polyimides from the organic solvent or ultra purified water, and dissolving the separated solid polyamic acids and soluble polyimides into a solvent. Recycling the alignment layer material in this method can significantly reduce the manufacturing costs.

Method for recycling alignment layer materials

Growing community of inventors

Choongcheongnam-do, South Korea

Soo-Won Lee