Samsung Display Co., Ltd.

Soo Hyun Min

Min Ju Kim

Young Eun Ryu

Taek Kyo Kang

Jae Suk Moon

Jung Woo Ko

Min Goo Kang

Su Cheol Gong

A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

Mask assembly, deposition apparatus including the same, and fabricating method of the mask assembly

A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 &#x3bc;m to 4,000 &#x3bc;m.

Mask and method of manufacturing mask assembly including the same

Growing community of inventors

Asan-si, South Korea

Soo Hyun Min