Samsung Display Co., Ltd.

Soo Beom Jo

Ju Hee Lee

Sang Gab Kim

Myungsoo Huh

Yun Jong Yeo

Myung Soo Huh

Cheollae Roh

Dae Won Choi

Juhee Lee

Voronov Alexander

Haeyoung Yoo

Dae Soo Kim

Yong Mun Chang

Jiwon Yeon

Yongmun Chang

Hae Young Yoo

An etching device includes a chamber; a stage disposed in the chamber and on which a target substrate is loaded; a gas distribution unit disposed to face the stage in the chamber; a plurality of plasma generation modules disposed above the chamber; a gas supply unit that supplies gas into the chamber; a gas line connecting the gas supply unit and the plurality of plasma generation modules; and a plurality of gas inlet pipes each including an end connected to the plasma generation module and another end connected to the gas distribution unit.

Etching device and method of manufacturing display device using the same

An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.

Electrostatic chuck

A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.

Plasma processing device

Growing community of inventors

Yongin-si, South Korea

Soo Beom Jo