Khs Corpoplast Gmbh

Sonke Siebels

Sebastian Kytzia

Michael Herbort

The method serves for the plasma treatment of container-like workpieces. The workpiece is inserted into an at least partially evacuable chamber of a treatment station. The plasma chamber is bounded by a chamber base, a chamber cover and a lateral chamber wall. The plasma treatment causes a coating to be deposited on the workpiece. The plasma is ignited by microwave energy. The coating consists at least of a gas barrier layer and a bonding layer arranged between the workpiece and the gas barrier layer. The gas barrier layer contains SiOx and the bonding layer contains carbon. The gas barrier layer is produced from a gas that contains at least one silicon compound and argon.

Method for the plasma treatment of workpieces and workpiece with a gas barrier layer

A method for the plasma treatment of a workpiece that includes inserting the workpiece into a plasma chamber and depositing, with the effect of a partial vacuum after plasma ignition, a coating on the workpiece by plasma treatment. Plasma ignition occurs by pulsed microwave energy, and alternating 'on' phase times and 'off' phase times from pulsed microwave excitation are provided by a control. During a beginning portion of the plasma treatment, a first portion of the coating is deposited. Subsequently, a quotient of the &#x201c;on&#x201d; phase times and the &#x201c;off&#x201d; phase times is increased to deposit a second portion of the coating, which has a different composition than the first portion of the coating. The quotient of the &#x201c;on&#x201d; phase times and the &#x201c;off&#x201d; phase times is then decreased to form a third portion of the coating, which has a different composition than the second portion of the coating.

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Hamburg, Germany

Sonke Siebels