Texas Instruments Corporation

Song Zheng

Kelly Jay Taylor

James Norman Hall

William Craig McDonald

Lucius Marshall Sherwin

John Wesley Hamlin

Noppawan Boorananut

Win-Jae Jessie Yuan

Chris Murray Beard

Jose Antonio Martinez Soto

Christopher Murray Beard

In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.

Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers

A system includes a hinge structure. The hinge structure includes four support posts and four hinges, each hinge coupled to an edge of a support post and to a plate of the hinge structure, where each hinge includes two 90° turns. The system also includes a mirror coupled to the hinge structure and an electrode structure coupled to the hinge structure.

Electrostatic actuator with 4-bit digital electrode

Methods and apparatus to control grayscale lithography are disclosed. A disclosed example apparatus for adjusting a grayscale lithography process includes an optical measurement device to optically measure portions of a patterned wafer, and a processor to calculate a profile based on the measured portions, and to determine an adjustment of the grayscale lithography process based on the calculated profile. The disclosed apparatus also includes an adjuster to control the grayscale lithography process based on the adjustment.

Methods and apparatus to control grayscale photolithography

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Allen, TX, United States of America

Song Zheng