Texas Instruments Corporation

Song C Park

Ming J Hwang

Takayuki Niuya

Boyang Lin

An embodiment of the instant invention is a method of oxidizing a first feature (feature and/or feature of FIG. and feature of FIG. ) while leaving a second feature substantially unoxidized (features and of FIG. and features and of FIG. ), the method comprised of subjecting the first and second features to an oxygen-containing gas and a separate hydrogen-containing gas. Preferably, the oxygen-containing gas is comprised of gas selected from the group consisting of O , N O, CO , H O, and any combination thereof, and the hydrogen-containing gas is comprised of H . The first feature is, preferably, comprised of polycrystalline silicon, silicon oxide, or a dielectric material, and the second feature is, preferably, comprised of tungsten.

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Plano, TX, United States of America

Song C Park