Infineon Technologies Ag

Somu Goswami

Christian Bretthauer

Matthias Friedrich Herrmann

Gunar Lorenz

David Tumpold

Daniel Neumaier

Pradyumna Mishra

A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor

A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.

Microelectromechanical system (MEMS) vibration sensor having a segmented backplate

Growing community of inventors

Munich, Germany

Somu Goswami