Samsung Mobile Display Co., Ltd.

Samsung Display Co., Ltd.

Samsung Sdi Co., Inc.

Sok Won Noh

Sun Hoe Kim

Myung Won Song

Jin Wook Seong

Seong Taek Lee

Mu Gyeom Kim

Sang Bong Lee

Mu Hyun Kim

Noh Min Kwak

Jin Soo Kim

Byeong Wook Yoo

Yeun Joo Sung

Tae Wook Kang

Seung Hyun Lee

Tae Min Kang

Jae Ho Lee

Jae Don Lee

Nam Choul Yang

Min Soo Kim

Jae-Ho Lee

Min-Chul Suh

Valeriy Prushinskiy

Tae-Min Kang

Jin-Won Sun

Young Gil Kwon

Sam Il Kho

An electrostatic chuck is disclosed. In one aspect, the electrostatic chuck includes a top plate, wherein first and second regions adjacent to each other are formed at a surface of the top plate. The electrostatic chuck also includes a first absorption plate positioned at the first region and a second absorption plate positioned at the second region to be separated from the first absorption plate. The first and second absorption plates are configured to support the absorption target.

Electrostatic chuck

An organic light-emitting display apparatus includes: a plurality of thin film transistors (TFTs); a planarization layer covering the plurality of TFTs; a plurality of pixel electrodes formed on the planarization layer, each of the pixel electrodes being connected to a corresponding one of the plurality of TFTs using a via-hole passing through the planarization layer and having a light-emitting portion and a non-emitting portion, and each of the via-holes being located at a point farthest from each of the light-emitting portions surrounding the via-hole; a pixel defining layer formed on the planarization layer to respectively cover each of the via-holes and the non-emitting portions; organic layers, each organic layer including an emission layer and being disposed in a corresponding one of the light-emitting portions; and a counter electrode disposed on each of the organic layers.

Organic light-emitting display apparatus

A laser induced thermal imaging apparatus and a fabricating method of organic light emitting diodes using the same, which laminate an acceptor substrate and a donor film using a magnetic force in vacuum, and are used to form a pixel array on the acceptor substrate. A substrate stage includes a magnet or magnetic substance. The acceptor substrate has a pixel region for forming first, second, and third sub-pixels, and the donor film has an organic light emission layer to be transferred to the pixel region. A laser oscillator irradiates a laser to the donor film. A contact frame is adapted to be disposed between the substrate stage and the laser oscillator, and is used to form a magnetic force with the substrate stage. The contact frame includes an opening through which the laser passes. A contact frame feed mechanism moves the contact frame in a direction of the substrate stage.

Laser induced thermal imaging apparatus and fabricating method of organic light emitting diode using the same

A laser induced thermal imaging (LITI) apparatus and a method of making an electronic device using the same are disclosed. The LITI apparatus includes a chamber, a substrate support, a contact frame, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto a surface of an intermediate electronic device. The LITI apparatus uses a magnetic force to provide a close contact between the transferable layer and the surface of the intermediate device. The magnetic force is generated by magnetic materials formed in two components of the LITI apparatus that are spaced apart interposing transferable layer and the surface of the intermediate device. Magnets or magnetic materials are formed in the two following components of the LITI apparatus: 1) the intermediate device and the film donor device; 2) the intermediate device and the contact frame; 3) the substrate support and the film donor device; or 4) the substrate support and the contact frame.

Film donor device for laser induced thermal imaging

Laser induced thermal imaging apparatus

A laser induced thermal imaging apparatus for imaging an imaging layer of a donor film on an acceptor substrate. The laser induced thermal imaging apparatus includes: a substrate stage having an electromagnet, and adapted to receive an acceptor substrate having a pixel area of the organic light emitting device and a donor film including the organic light emitting layer to be imaged on the pixel area; a laser oscillator for irradiating a laser on the donor film; a contact frame adapted to be located between the substrate stage and the laser oscillator and including an opening portion of a pattern corresponding to a part to be imaged of the donor film and a permanent magnet for forming a magnetic force with the substrate stage; and a contact frame moving mechanism for moving the contact frame toward the substrate stage.

Laser induced thermal imaging apparatus and laser induced thermal imaging method

A laser induced thermal imaging (LITI) apparatus, an LITI method, and an organic light emitting display (OLED) device. An LITI apparatus for forming a light emitting layer of an OLED device includes a substrate stage adapted to receive an accepter substrate and a donor film to be laminated, the accepter substrate having a pixel area of the OLED device and a magnet, the donor film having the light emitting layer transferred to the pixel area; a laser oscillator for radiating a laser to the donor film; a contact frame adapted to be placed between the substrate stage and the laser oscillator, the contact frame having at least one transmission portion corresponding to the light emitting layer transferred to the acceptor substrate and having a magnet for forming a magnetic force with the accepter substrate; and a contact frame transferring mechanism for moving the contact frame toward the substrate stage.

Laser induced thermal imaging apparatus and laser induced thermal imaging method and organic light emitting display device using the same

A laser induced thermal imaging apparatus and a manufacturing method of organic light emitting diodes using the same, which reduce or prevent the occurrence of impurities or void between an acceptor substrate and a donor film while performing a laser induced thermal imaging in a vacuum state. A laser induced thermal imaging apparatus includes: a substrate stage including an acceptor substrate for receiving an imaging layer, the imaging layer being formed on the acceptor substrate, and an electromagnet, a donor film having a permanent magnet being placed and laminated on the substrate stage, and the electromagnet forming a magnetic force with a permanent magnet of the donor film; a laser oscillator for irradiating a laser to the donor film; and a chamber having at least the substrate stage located therein.

Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diode using the same

A laser induced thermal imaging apparatus and a laser induced thermal imaging method. A laser induced thermal imaging apparatus has electromagnets in an adhesion frame and a substrate stage to closely adhere a donor film to a substrate. The laser induced thermal imaging apparatus includes a process chamber including a donor film and a substrate, and adapted to carry out a process for depositing the donor film on the substrate; a substrate stage having a first electromagnet, and positioned in the process chamber to support the substrate; an adhesion frame having a second electromagnet, and positioned over the substrate stage, wherein the donor film and the substrate are disposed between the substrate stage and the adhesion frame in the process chamber; and a laser oscillator adapted to apply a laser output to the donor film.

A laser induced thermal imaging method capable of effectively laminating a donor film and an acceptor substrate using a magnetic force; and a fabricating method of an organic light-emitting diode using the same. The laser induced thermal imaging method includes arranging an acceptor substrate, in which a first magnet is formed in one surface thereof, on a substrate stage in a processing chamber; arranging on the acceptor substrate a donor film including a second magnet; laminating the donor film and the acceptor substrate using a magnetic force acting between the first and second magnets; and transferring at least one region of an imaging layer onto the acceptor substrate by scanning a laser on the donor film. The laser induced thermal imaging method improved adhesion between the donor film and the acceptor substrate improves a life span, a yield and a reliability of the organic light-emitting diode.

Laser induced thermal imaging method and fabricating method of organic light-emitting diode using the same

An organic light emitting diode, and a method of fabricating the same, the organic light emitting diode including a pixel-defining layer disposed on a substrate, the pixel-defining layer having an opening therein and having at least one stepped portion formed adjacent to the opening, and an organic layer disposed in the opening and at least partially covering the at least one stepped portion.

Organic light emitting diode and method of fabricating the same

Method of making an organic light emitting display device

Growing community of inventors

Seoul, South Korea

Sok Won Noh