Smc Corporation

Tohoku University

Smc Kabushiki Kaisha

Soichi Sato

Ken Tamura

Kenta Onuki

Seiichi Nagura

Eiko Miyasato

Makoto Yaegashi

Naoki Shinjo

Kazufumi Waki

Migaku Takahashi

Tsukasa Odaka

Masakiyo Tsunoda

Takashi Abe

Youji Takakuwa

Kengo Monden

Junya Kaneko

Masayuki Ishikawa

Fluid pressure cylinder

Rodless cylinder

A cylinder chamber filled with a liquid, a piston disposed inside the cylinder chamber, a piston rod connected to the piston, and an accumulator allowing the piston rod to generate a damping force by receiving the liquid from a compression side of the cylinder chamber are included, and on an internal periphery of the cylinder chamber, one line of a helical damping groove is formed within a stroke range of the piston, a groove width of the damping groove is constant over the entire length of the damping groove, a depth of the damping groove gradually decreases along a spiral toward the direction in which the piston rod is pushed in, and a length of the piston in a direction along the axis line is smaller than a pitch of the damping groove.

Shock absorber

A working rod with a tip end extending into a vacuum process chamber and moving in the axial direction, two static-pressure gas bearings supporting the rod in the non-contact manner, and an internal moving body of a magnet coupling type driving mechanism driving the rod are housed in a rod housing cylindrical portion leading to the vacuum process chamber, and an exhaust portion by suction is provided at a part of the rod housing cylindrical portion so that the pressure of the rod housing cylindrical portion is lowered than the pressure of the vacuum process chamber by the exhaust from the exhaust portion.

Straight conveying device for vacuum

A first and a second static-pressure gas bearings supporting a rod at two locations in the axial direction in the non-contact manner are provided, in which the first static-pressure gas bearing is fixedly supported by a bearing housing, while the second static-pressure gas bearing is supported capable of displacement through a movable support mechanism. And this movable support mechanism has an actuator and suppresses contact of the rod with the static-pressure gas bearings by displacing the shaft center of the second static-pressure gas bearing with respect to the first static-pressure gas bearing by this actuator according to a load acting on the rod.

Static-pressure gas bearing mechanism

Growing community of inventors

Kashiwa, Japan

Soichi Sato