Asml Holding N.v.

Sohrab Simani

Windy Lynn Farnsworth

An apparatus for supporting an optical element is provided. The apparatus includes a lens cell () and a plurality of fingers () coupled to the lens cell. Each finger includes a base () configured to be coupled to the optical element when mounted therein, first () and second () flexures coupled at first respective ends to and extending from the base () at a divergence angle between about 75 and 165 degrees, and a mounting member () configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base () to the lens cell ().

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Waltham, MA, United States of America

Sohrab Simani