Tel Aviv University

Terraop Ltd.

Teraop Displays Ltd.

Slava Krylov

Moshe Medina

Avigdor Huber

Daniel I Barnea

Amir Boag

Oren Levy

David Schreiber

Ben-Zion Steinberg

Ronen Lalezar

Tsvi Shmilovich

Ilan Goldfarb

Eliezer Ben-Gad

An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Tilting actuator with close-gap electrodes

An optical device is presented for use in modulation of light and/or in sensing an external field, by at least partially, directly or indirectly exposing the device to the controllable or unknown external field. The device comprises a waveguide structure configured to define at least a first light channel having a light input and a light output, and having a first deformable resonating structure. The device thereby allows exposure of said at least first channel to the external field of the kind affecting a deformation of the first resonant structure thus causing a change in the first resonant wavelength, resulting in a corresponding change in at least one parameter of light output from said first channel, said change in the output light parameter being indicative of the external field.

Optical sensor and modulator

A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Bouncing mode operated scanning micro-mirror

A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis, and a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. The bouncing mechanism includes an element chosen to impart an overall nonlinear stiffness to the system and is selected from the group of elements consisting of a bouncer and a pre-curved nonlinear stiffness element.

Growing community of inventors

Holon, Israel

Slava Krylov