Beijing Naura Microelectronics Equipment Co., Ltd.

Sixue Shi

Lin Cui

Fangna Wu

Muya Liu

The present disclosure provides a start method and device of a processing task in a semiconductor processing apparatus. The method includes generating a processing area relationship list of a current processing task of the semiconductor processing apparatus; determining all to-be-started processing tasks and generating a processing area relationship list for each of the to-be-started processing tasks, based on the processing area relationship list of the current processing task and the processing area relationship list of each of the to-be-started processing task, determining whether all the to-be-started processing tasks include a startable processing task according to a first predetermined rule, when all the to-be-started processing tasks include a startable processing task, selecting a target startable processing task from all startable processing tasks according to a second predetermined rule, and starting the target startable processing task.

Processing task start method and device in semiconductor processing apparatus

Embodiments of the present disclosure provide a material scheduling method and a material scheduling device for semiconductor processing equipment. The method includes establishing a material list, establishing a first scheduling task list according to process recipes and the material list, and inputting the first scheduling task list into a solver to calculate and output a scheduling result with shortest time for performing all material scheduling tasks in the first scheduling task list and parsing the scheduling result to obtain a movement sequence of all materials. In the technical solutions of the material scheduling method and the material scheduling device for the semiconductor processing equipment of embodiments of the present disclosure, the overall scheduling result can be improved, and the calculation speed can be improved. Thus, the scheduling result can be obtained in real-time.

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Beijing, China

Sixue Shi