Applied Materials, Inc.

Sivasankar Nagarajan

Patrick John Tae

Philip Allan Kraus

Keith R Berding

Upendra V Ummethala

Blake Erickson

Devendra Channappa Holeyannavar

Shivaraj Manjunath Nara

Anandakumar Parameshwarappa

Dhirendra Kumar

Michael D Willwerth

Leonard Michael Tedeschi

Yaoling Pan

Charles Hardy

Mikhail Taraboukhine

Kiyki-Shiy N Shang

Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

Smart camera substrate

Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.

Capacitive sensing data integration for plasma chamber condition monitoring

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Bengaluru, India

Sivasankar Nagarajan