Mitutoyo Corporation

Sinichirou Yanaka

Naoyuki Taketomi

A tracking type laser interferometer that detects displacement of a retroreflectorbeing an object to be measured by utilizing interference of a laser beamirradiated onto the retroreflectorand reflected by the retroreflectorin the returning direction, and carries out tracking by means of a two-axis turning mechanismusing displacement in the position of the optical axis of the laser beam; the same tracking type laser interferometer, includes; a light irradiatorthat emits a fan-shaped laser lightthat is fan-shaped including the optical axis of the laser beam, is interlocked with turning movements of the two-axis turning mechanismaround an axis orthogonal to the center axis of the corresponding fan shape; and a light receptorthat has a specific positional relationship with the retroreflectoror the light irradiatorand receives the fan-shaped laser light. Thereby, tracking can be automatically reset when the tracking is disabled due to a reason such as interruption of laser light or initial adjustment work can be automated when commencing measurement.

Growing community of inventors

Tsukuba, Japan

Sinichirou Yanaka