Sumitomo Chemical Company, Limited

Singo Fujita

Koji Ichikawa

Yukako Anryu

A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin: wherein Rrepresents a hydrogen atom, a halogen atom or a Cto Calkyl group in which a hydrogen atom may be replaced by a halogen atom, Rrepresents a Cto Cperfluoroalkyl group or *&#x2014;CHRR, * represents a binding site to a carbonyl group, Rand Reach independently represent a Cto Cperfluoroalkyl group or Rand Rmay be bonded together with a carbon atom bonded thereto to form a ring, Arepresents a single bond, a Cto Calkanediyl group or **-A-X-(A-X)-(A)-, ** represents a binding site to an oxygen atom, A, A, Aand Aeach independently represent a Cto Calkanediyl group, Xand Xeach independently represent &#x2014;O&#x2014;, &#x2014;CO&#x2014;O&#x2014; or &#x2014;O&#x2014;CO&#x2014;, a and b each represent 0 or 1, and Wrepresents a Cto Cdivalent alicyclic hydrocarbon group.

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Osaka, Japan

Singo Fujita