Taiwan Semiconductor Manufacturing Comp. Ltd.

National Yang Ming Chiao Tung University

Sing-Tsung Li

Hsu-Shui Liu

Jiun-Rong Pai

Feng-Kuang Wu

Shou-Wen Kuo

Chih-Kuo Chang

Sheng-Hsiang Chuang

Chien-Ko Liao

Chao-Keng Li

Wun-Kai Tsai

Zheng-Jie Xu

Wen-Che Liang

Yang-Ann Chu

Cheng-Lung Wu

Jin-Chern Chiou

Mang Ou-Yang

Ting-Wei Huang

Ren-Hau Wu

Yung-Jhe Yan

Yung-Jiun Lin

Yao-Fang Hsieh

Ming-Hsui Tsai

Jeng-Ren Duann

Shuen-De Wu

Zheng-Lin He

Chin-Siang Yang

A fabrication system for fabricating IC is provided. A processing tool includes at least one electrode and a RF sensor. The electrode is configured to receive a radio frequency (RF) signal from an RF signal generator during first and second semiconductor manufacturing processes. The RF sensor wirelessly detects intensity of the RF signal. A computation device extracts statistical characteristics with a sampling rate based on the detected intensity of the RF signal. A fault detection and classification (FDC) system includes a processor. The processor is configured to determine whether or not the detected intensity of the RF signal exceeds a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the processor notifies the processing tool to adjust the RF signal or stop tool to check parts damage.

Arcing protection method, processing tool and fabrication system

A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.

Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium

A fabrication system for fabricating an IC is provided which includes a processing tool, a computation device and a FDC system. The processing tool includes an electrode and an RF sensor to execute a semiconductor manufacturing process to fabricate the IC. The RF sensor wirelessly detects the intensity of the RF signal. The computation device extracts statistical characteristics based on the detection of the intensity of the RF signal. The FDC system determines whether or not the intensity of the RF signal meets a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the FDC system notifies the processing tool to adjust the RF signal or stop tool to check parts damage.

Arcing protection method and processing tool

An under-floor charging station can be mounted under a floor such that a top plate of the under-floor charging station is substantially flush with a top surface of the floor without touching the ground. Openings in the top plate allow charging elements to extend when in use to charge a mobile robot, and to retract under the floor when not in use. The retractable charging elements prevent tripping hazards and allow the mobile robot to move freely throughout a clean room. Moreover, because the charging elements can be retracted in an unobtrusive position when the under-floor charging station is not in use, the under-floor charging station is permitted to be positioned in locations in the clean room that allow the mobile robot to continue working while charging and/or allow non-stop running of the mobile robot.

Under-floor charging station

Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.

Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber

The present invention is directed to a device which includes the following features: a light source illuminates a target to generate an optical inspection signal; a probe head provides an optical path for the optical inspection signal; a probe tube arranged at a front end of the probe head; at least one switched filter module arranged in the optical path, allowing the optical inspection signal to pass therethrough to generate a corresponding spectral signal; and an image sensor arranged behind the switched filter module, receiving the spectral signal and generating a spectral image. The spectral image can be transmitted to an external device, wherefrom the user can use the spectral image to examine the target in further detail. The present invention features a rotary-type or movable-type switched filter module, which facilitates the user to switch filters easily during optical inspection.

Portable noninvasive inspection device

Growing community of inventors

Taichung, Taiwan

Sing-Tsung Li