Wacker Chemie Ag

Simon Pedron

Gerhard Forstpointner

Bernhard Baumann

A subject of the invention is a fluidized-bed reactor for producing granular polycrystalline silicon. The fluidized-bed reactor comprises a segmented reactor tube, which is disposed between a reactor top and a reactor bottom, a heating facility, at least one nozzle for supplying fluidizing gas, at least one nozzle for supplying reaction gas, a facility for supplying silicon seed particles, a product removal line, and an offgas removal line. The segmented reactor tube comprises a base segment and at least one spacer segment, there being disposed, between base segment and spacer segment, a flat seal made from a carbon-containing material, the spacer segment consisting of a material which, within a temperature range from 100 to 950&#xb0; C., has a thermal conductivity of &#x3c;2 W/mK.

Fluidized bed reactor for production of granular polycrystalline silicon

The fluidized bed process for preparing polysilicon by chemical vapor deposition is improved by positioning at least one Laval nozzle upstream from a gas inlet into the reactor.

Fluidized bed reactor and method for producing granular polysilicon

Prolonged operation campaigns in a fluidized bed reactor for producing granular polysilicon by deposition of silicon onto silicon seed particles from a silicon-containing precursor gas is made possible by employing a silicon-coated reaction tube which is not insulated above a region of the fluidized bed and as a result has a lower temperature such that the ratio of the thickness of the silicon on the reactor tube adjoining the fluidized bed to the coating thickness over the total reactor tube is from 7:1 to 1.5 to 1 after production campaign of from 15 to 500 days.

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Burghausen, Germany

Simon Pedron