Applied Materials, Inc.

Simon Nicholas Binns

Brian T West

Roger M Johnson

Michael Santiago Cox

Ronald Vern Schauer

Yan Rozenzon

Soundarrajan Jembulingam

Mark Roger Covington

Miroslav Gelo

Vivek Vinit

Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.

Pedestal lift for semiconductor processing chambers

A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

Smart chamber and smart chamber components

Growing community of inventors

East Palo Alto, CA, United States of America

Simon Nicholas Binns