Taiwan Semiconductor Manufacturing Comp. Ltd.

Simon King

Yung-Dar Chen

Rong Hau Hsueh

An anti-electrostatic discharge spray gun apparatus and method for preventing crystallization of particles formed as a result of electrostatic discharge from forming on a spray gun nozzle and an associated pair of oppositely charged electrodes disposed on the gun. The apparatus has a housing; a nozzle attached to the housing for dispensing gas; a device for dispensing a gas through the nozzle; a device for electrostatically discharging a gas dispensed through the nozzle; and a device for restricting the flow of a gas through the nozzle. The device for dispensing and restricting flow of a gas through the nozzle may be either a bypass piping having a flow control means or a stopper that operates to provide a constant but low volume flow of an inert gas such as nitrogen to the nozzle to prevent particle build up or crystallization from occurring.

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Taipei, Taiwan

Simon King