Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cymer, Inc. (2 from 532 patents)
2 patents:
1. 10036960 - Wafer-based light source parameter control
2. 9715180 - Wafer-based light source parameter control