Crytur, Spol. S.r.o.

Tescan Orsay Holding, A.s.

Silvie Dokulilova

Martin Zadrazil

Karel Blazek

Petr Horodyský

A scintillation detection unit for the detection of back-scattered electrons for electron and ion microscopes, in which the scintillation detection unit consists of body and at least one system for processing the light signal, where the body is at least partly made of scintillation material and is at least partly situated in a column of an electron or ion microscope and is made up of at least one hollow part. The height of the body of scintillation detection unit measured in the direction of longitudinal axis is greater than one-and-a-half times the greatest width measured in the direction perpendicular to the longitudinal axis of the hollow part with the greatest width. The walls of the hollow parts are vacuum-sealed in the areas outside bottom holes and top holes and make up part of a vacuum-sealed jacket which is passed through by the primary beam of electrons.

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Brno, Czechia

Silvie Dokulilova