Average Co-Inventor Count = 4.36
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,771 patents)
2 patents:
1. 10566216 - Equipment front end module gas recirculation
2. 10190865 - Verifying end effector flatness using electrical continuity