Stmicroelectronics S.r.l.

Stmicroelectronics International N.v.

Silvia Nicoli

Flavio Francesco Villa

Paolo Ferrari

Enri Duqi

Giorgio Allegato

Lorenzo Corso

Mikel Azpeitia Urquia

Roberto Campedelli

Andrea Nomellini

Matteo Garavaglia

Luca Lamagna

Maria Carolina Turi

Anna Alessandri

Filippo Daniele

The present disclosure is directed to a method for manufacturing a micro-electro-mechanical device. The method includes the steps of forming, on a substrate, a first protection layer of crystallized aluminum oxide, impermeable to HF; forming, on the first protection layer, a sacrificial layer of silicon oxide removable with HF; forming, on the sacrificial layer, a second protection layer of crystallized aluminum oxide; exposing a sacrificial portion of the sacrificial layer; forming, on the sacrificial portion, a first membrane layer of a porous material, permeable to HF; forming a cavity by removing the sacrificial portion through the first membrane layer; and sealing pores of the first membrane layer by forming a second membrane layer on the first membrane layer.

Method for manufacturing a capacitive pressure sensor and capacitive pressure sensor

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Casatenovo, Italy

Silvia Nicoli