Robert Boschgmbh

Silvia Kronmüller

Frank Reichenbach

Christina Leinenbach

Franz Lärmer

A micromechanical component having a substrate conductive in at least some regions; an elastically deflectable diaphragm, which is conductive in at least some regions, arches over a front side of the substrate, and is electrically insulated from the substrate, the diaphragm having an inner region (I; I') and an edge region (RB; RB&#x2032;); and a hollow space (H), which is provided between the substrate () and the diaphragm (M); the inner region (I; I&#x2032;) having a cross-section that is modified in comparison with the edge region (RB; RB&#x2032;), which means that the bending of the inner region (I; I&#x2032;) is less than that in the case of an identical cross-section.

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Schwaikheim, Germany

Silvia Kronmüller