Chinese Academy of Sciences

Sihan Wu

Yi Li

Yu He

Xiangang Luo

Lixin Zhao

Jinhua Feng

Shaoyu Zhang

Hongyu Shao

Provided are illumination field non-uniformity detection system, detection method, correction method, and device provided. The system includes displacement control module, controlling displacement platform to drive photodetector and image sensor to move within illumination field; illumination signal acquisition module, controlling the photodetector to collect different response signals at various collecting frequencies within the illumination field and controlling the image sensor to collect response images within the illumination field; data processing module, obtaining, based on different response signals, multiple illumination fields with different light radiation intensities and light intensity distribution considered to be uniform; based on this, obtaining multiple corrected image sensor grayscale matrices; fitting the multiple corrected image sensor grayscale matrices to obtain parameter matrix; and non-uniformity detection module, correcting the response images based on the parameter matrix; and characterizing non-uniformity of light intensity distribution within the illumination field using non-uniform metrics of grayscale distribution of the corrected response images.

Illumination field non-uniformity detection system, detection method, correction method, and device

Growing community of inventors

Sichuan, China

Sihan Wu