Jenoptik Aktiengesellschaft

Siegfried Belke

Wolfgang Ecke

Burkhard Hahn

Steffen Goerlich

Steffen Loesch

An arrangement for the detection of disk-shaped objects in a cassette preferably for detecting the presence and the position of semiconductor wafers in a cassette is disclosed. Reliable detection of disk-shaped objects in cassettes is provided regardless of their orientation or any discontinuity in their edge region. This is done by an arrangement by detecting light reflected at the edges of the objects in that it has at least two linearly elongated rows of light sources which are arranged parallel to a family of planes predetermined by the cassette shelves and objects and which lie in a surface parallel to the edge areas to be detected. Further, an objective is arranged between the parallel linear light sources and by which a plurality of shelves is imaged simultaneously on the sensor unit. There can be read out of the array of sensor elements at least portions of an edge area of the objects which is elongated transversely to such an extent that, when imaged in the sensor plane, an irregularity present in the edge area of the object is always less than the read out portions of the elongated edge area.

Arrangement for the detection of disk-shaped objects in a cassette

An arrangement for simultaneous optical determination of temperature and strain fluctuations in an optical fiber for precisely determining the changes in environmental influences and/or fiber loads is disclosed. The arrangement performs two different measurement tasks of the absolute measurement of a stationary quantity, such as temperature and the relative, high-resolution measurement of quickly varying quantities of fluctuation processes with comparable accuracy in a single optical The arrangement which is achieved using a spectrometer with an imaging, spectrally dispersive element, a first input light bundle being arranged with reference to the dispersive element such that the light spectrally dispersed at the dispersive element is projected onto a first linear receiver The arrangement, and an additional second input light bundle is directed onto the dispersive element in the spectrometer, whose spectrally dispersed light falls onto a second linear receiver The arrangement, parallel to the first one, the two input light bundles are fed light from a broadband light source which has been reflected by at least two optical fiber gratings with different mean wavelengths, and an interferometer The arrangement with phase modulation and different arm lengths is present at least in the light path of the second input light bundle upstream of the spectral dispersion by means of the dispersive element, whose evaluation is performed via the second receiver. The arrangement by means of phase modulation modules with reference to relative changes in the Bragg wavelengths, while a CCD evaluation module for determining the absolute Bragg wavelengths of the optical fiber gratings is arranged downstream of the first receiver The arrangement.

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Jena, Germany

Siegfried Belke