Arch Specialty Chemicals, Inc.

Sidney George Slater

Andrew J Blakeney

Sanjay Malik

Binod B De

John Joseph Biafore

Patrick Foster

Thomas Steinhausler

Gregory Domenic Spaziano

Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the following formula:wherein Ris H or methyl; Ris a substituted or unsubstituted C-Caryl acrylate or C-Caryl methacrylate group wherein the substituted groups may be phenyl, Calkyl or Calkoxy; Ris a hydroxyl functionalized C-Calkyl acrylate, methacrylate or C-Caryl group, Ris a C-Clinear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [&#x2014;RO&#x2014;]; Ris a C-Clinear, branched or cyclic alkyl, substituted or unsubstituted C-Caryl, or substituted or unsubstituted C-Calicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.

Thermally cured underlayer for lithographic application

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Poughquag, NY, United States of America

Sidney George Slater