Skyworks Solutions, Inc.

Skyworks Global Pte. Ltd.

Siarhei Dmitrievich Barsukou

Hiroyuki Nakamura

Rei Goto

Keiichi Maki

Myeong Gweon Gu

Takanori Yasuda

Ousmane I Barry

A piezoelectric microelectromechanical system microphone comprises a support substrate, a cantilever sensing element including a piezoelectric material attached to the support substrate and configured to deform and generate an electrical potential responsive to impingement of sound waves on the cantilever sensing element the cantilever sensing element divided into a plurality of cantilevers having gaps between side edges of adjacent cantilevers, and a compliant material disposed in at least a portion of the gaps between adjacent cantilevers to improve the performance of the piezoelectric microelectromechanical system microphone.

Acoustic resistance improvement in piezoelectric microelectromechanical system microphone using compliant joint

A piezoelectric microelectromechanical systems device can include a cavity bounded by walls and an asymmetrical bimorph structure at least partially spanning the cavity that includes at least a piezoelectric layer and two electrode layers. The electrode layers can have relative thicknesses configured to compensate for expected temperature stress in the bimorph structure. Thus, metals having different thicknesses can be positioned and configured to compensate deflection due to thermal stress of any or all of the piezoelectric layer, the first metal layer, and second metal layer and a substrate. A method for making the piezoelectric microelectromechanical systems device is also provided.

Piezoelectric MEMS device with thermal compensation from different material thicknesses

Dispersive delay lines are disclosed. A dispersive delay line can include a piezoelectric substrate having a first interdigital transducer electrode on a first region of the piezoelectric substrate and a second interdigital transducer electrode on a second region of the piezoelectric substrate. The dispersive delay line is arranged such that an acoustic wave is configured to propagate from the first interdigital transducer electrode to the second interdigital transducer electrode though a third region of the piezoelectric substrate. The third region of the piezoelectric substrate is configured as a waveguide and can have a thickness of less than half the wavelength of the acoustic wave. Related radio frequency modules, wireless communications devices, and methods are disclosed.

Dispersive delay line with piezoelectric substrate

A piezoelectric microelectromechanical system microphone comprises a piezoelectric element configured to deform and generate an electrical potential responsive to impingement of sound waves on the piezoelectric microelectromechanical system microphone, a sensing electrode disposed on the piezoelectric element and configured to sense the electrical potential, and a passive membrane mechanically coupled to the surface of the piezoelectric element to increase sensitivity of the piezoelectric microelectromechanical system microphone.

Dual membrane piezoelectric microelectromechanical system microphone

A piezoelectric microelectromechanical system microphone comprises a support substrate, a membrane including a piezoelectric material attached to the support substrate and configured to deform and generate an electrical potential responsive to impingement of sound waves on the membrane, and a compliant anchor including a trench defined in the support substrate about a portion of a perimeter of the membrane to increase sensitivity of the piezoelectric microelectromechanical system microphone.

Anchor silicon dioxide layer for piezoelectric microelectromechanical system microphone

An interdigital transducer increased propagation frequency and a method for making the same is described. The transducer comprises a substrate for propagation of acoustic waves comprising a first surface having alternating high and low surface portions extending laterally across the substrate, a set of elongate first electrodes, each first electrode disposed on a respective high surface portion and a set of elongate second electrodes, each second electrode disposed on a respective low surface portion such that the first and second electrodes are alternately adjacent to one another, the high and low surface portions being substantially equal in width to each electrode of the first and second sets of electrodes.

Interdigital transducer electrode for acoustic wave device with improved response

An acoustic wave element is disclosed. The acoustic wave element can include a piezoelectric layer that includes aluminum nitride. The acoustic wave element can also include a diamond like carbon layer. The acoustic wave element can further include an interdigital transducer electrode that is positioned on the piezoelectric layer. The piezoelectric layer is positioned between the interdigital transducer electrode and the diamond like carbon layer. The acoustic wave element is configured to generate a Lamb wave having a wavelength of λ.

Acoustic wave element having high acoustic velocity layer

Dispersive delay lines are disclosed. The dispersive delay line can include a piezoelectric substrate having a first interdigital transducer electrode on a first region of the piezoelectric substrate and a second interdigital transducer electrode on a second region of the piezoelectric substrate. The dispersive delay line is arranged such that an acoustic wave is configured to propagate from the first interdigital transducer electrode to the second interdigital transducer electrode though a third region of the piezoelectric substrate. An additional material positioned on the third region of the piezoelectric substrate can impact acoustic wave propagation velocity. Related radio frequency modules, wireless communications devices, and methods are disclosed.

Dispersive delay line with lamb wave propagation

A delay line for radio frequency circuits comprises a piezoelectric substrate, a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate, and a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT.

Lamb wave delay line

Lamb wave delay line with aluminum nitride piezoelectric layer

A piezoelectric MEMS microphone includes a substrate and a piezoelectric sensor movably coupled to the substrate. The piezoelectric sensor includes a multilayer cantilever beam with multiple piezoelectric layers and multiple metal electrode layers. The beam is attached to the substrate and extends to a distal tip at a free unsupported end. A feedback control circuit is electrically connected to one or more of the metal electrode layers and applies a direct current bias voltage between at least two of the metal electrode layers to actively control an acoustic resistance of the piezoelectric sensor.

Growing community of inventors

Takarazuka, Japan

Siarhei Dmitrievich Barsukou