National Taipei University of Technology

Kutai Electrical Industrial Co., Ltd.

Shyh-Tsong Lin

Liang-Chia Chen

Sheng-Lih Yeh

Chi-Wang Kuo

An orthogonal-polarization Mirau interferometric system is provided, wherein a narrow-band or broad-band incident light is split into a reference light and an inspection light with the polarizations thereof being orthogonal to each other by using a beam-splitting module, while projecting the inspection light on a measured object to form an object light, and then the object light and the reference light are combined to form a combined light, and thereafter, an analyzer is utilized to modulate the polarizations and the intensities of the two lights for making the two lights interfere with each other and thus create an interference pattern. The polarization of the object light and that of the reference light can be adjusted by using an analyzer to become orthogonal to each other, and the intensities of the object light and the reference light can be adjusted to about the same for producing an interference pattern with high contrast.

Orthogonal-polarization mirau interferometry and beam-splitting module and interferometric system using the same

A vibration-resistant interferometric scanning system and method are provided in the present invention. In the present invention, the brightness distribution in a high-coherence interference pattern is analyzed so as to perform a compensation action to lock the brightness distribution of a high-coherence interference pattern and consequently locking the fringe distribution of a low-coherence interference pattern or to perform a scanning operation composed of plural shifting actions with specified scanning distances in sequence and plural compensation actions to lock the fringe distribution in a low-coherence interference pattern corresponding to the surface profile of a measured object. Consequently, with the system and method of the present invention, the surface profile of a measured object disturbed by external or internal vibrations can be measured accurately and precisely.

Vibration-resistant interferometric scanning system and method thereof

A method and a system for generating grating images with an improved speed is disclosed. The system utilizes a coherent light source for providing a coherent beam L, an exposure control device for controlling the exposure of the coherent beam L, a beam guiding device for controlling the pitch and the orientation of each grating, a symmetrical beam generating device for splitting the coherent beam L into two symmetrical coherent beams, a local scan device for allowing the two coherent beams to intersect and form a standing wave, at different position in a small local scan area in order to combine different gratings in the local scan area, a photosensitive material for recording the standing wave, and a supporting device for supporting and moving the photosensitive material so as to combine different local scan area, and obtain a large scale grating image.

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Taipei, Taiwan

Shyh-Tsong Lin