Other

Kabushiki Kaisha Toyoda Jidoshokki Seisakusho

Meitec Corporation

Shuzo Hattori

Akihiro Yoshida

Kazunori Shimazaki

Takatoshi Ito

Hiroshi Miyake

Takashi Tagawa

Motomu Asano

Naomasa Wakita

Makoto Okuda

Takahide Iida

A hybrid IC substrate has a substrate body and a retaining film which is formed on a surface of the substrate body. The retaining film enables a solution containing a circuit-element-forming material to permeate therethrough and retains the solution on the substrate body. The solution, which is expelled onto the hybrid IC substrate in the form of liquid drops, permeates the above-mentioned retaining film and becomes attached to the surface of the substrate body. Then, the hybrid IC substrate is baked. The retaining film is thus backed off, thereby forming a film of the circuit-element-forming material as a circuit pattern on the substrate body.

Substrate of a hybrid IC, method of forming a circuit pattern and

A hybrid IC substrate has a substrate body and a retaining film which is formed on a surface of the substrate body. The retaining film enables a solution containing a circuit-element-forming material to permeate therethrough and retains the solution on the substrate body. The solution, which is expelled onto the hybrid IC substrate in the form of liquid drops, permeates the above-mentioned retaining film and becomes attached to the surface of the substrate body. Then, the hybrid IC substrate is baked. The retaining film is thus baked off, thereby forming a film of the circuit-element-forming material as a circuit pattern on the substrate body.

Substrate of a hybrid ic, method of forming a circuit pattern and

An X-ray generator includes a vacuum vessel; a cathode disposed in the vacuum vessel for emitting an electron beam; a plurality of stators constituting an electric motor and disposed within the vacuum vessel for generating rotating magnetic fields; a drum-shaped anode adapted to rotate upon reception of the rotating magnetic fields generated from the stators and radiate an X-ray upon reception of the electron beam emitted from the cathode, the drum-shaped anode having a circumferentially extending narrow groove formed at the position where the electron beam from the cathode is focused; a plurality of rotary fins mounted on the drum-shaped anode for dissipating the heat generated in the groove upon radiation of an X-ray; and a plurality of fixed fins mounted within the vacuum vessel in opposed relation to the rotary fins and adapted to receive the heat transferred from the rotary fins and dissipate the heat to the outside of the vacuum vessel.

X-ray generator with grooved rotary anode

An inspecting method and device for inspecting an object or objects such as photomasks having a plurality of identical patterns, to detect defects of the patterns, wherein the object is placed such that the patterns lie in the same plane, and an inspection mask having a plurality of translucent apertures is placed such that the inspection mask is adjacent and parallel to the object. The inspection mask and the object are moved relative to each other whereby each aperture is positioned opposite to mutually corresponding portions of the patterns. The object and inspection mask are irradiated with rays of light emitted in a direction substantially normal to the plane of relative movements thereof. The rays of light transmitted through the apertures and the object are converted into electric signals, and the electric signals associated with the corresponding portions of the patterns are compared with each other, prior to obtaining the electric signals of all of the plurality of patterns. If the electric signals of the corresponding portions of the patterns differ from each other, these portions are determined to be defective.

Method and device for detecting defects of patterns in microelectronic

A light deflection apparatus is disclosed, which comprises a tiltable member supported by point support and having a reflecting mirror surface provided at the top, and piezoelectric stacks respectively provided on perpendicular x- and y-axes intersecting at the support point and at positions spaced apart therefrom and capable of being elongated and contracted in vertical directions with application of voltage, the displaceable end of each of the piezoelectric stacks being coupled to the tiltable member to permit tilting of the reflecting mirror surface in a desired direction and to a desired extent about the support point with an elongation or contraction of the piezoelectric stacks.

Growing community of inventors

Aichi-gun, Aichi-ken, Japan

Shuzo Hattori