California Institute of Technology

Integrated Micromachines, Inc.

Shuyun Wu

Yu-Chong Tai

Ellis Fan-chuin Meng

Weilong Tang

Denny K Miu

Brent E Burns

Viktoria Temesvary

Qiao Lin

A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size, has a body which has a shape conforming the shape of the cavity into which the body must fit. A through hole is defined through the body. The through hole has a size conforming to the first size of the capillary. The capillary is disposable into the through hole so that the capillary is communicated to the orifice without the first and second sizes necessarily being the same. The cavity and the body have conforming slanting surfaces, and in particular the cavity and the body define truncated pyramidal shapes. The cavity and the body each have a truncated pyramidal shape. The pyramidal shape may be square, triangular, or conical. A method of fabricating the micromachined coupler is achieved either by micromaching or micromolding.

Micromachined fluidic coupler and method of making the same

The present invention is directed to a micro-switch assembly involving a magnetic latching mechanism. In one aspect of the present invention, it involves a micromachined structure that comprises an outer frame, an inner frame pivotally connected to the outer frame and rotates when an external electromagnetic force is applied, and a mechanism for latching the inner frame at a given angle of inclination relative to the outer frame. One embodiment of the present invention involves the use of a magnetic material, such as Permalloy, and permanent magnets to achieve the latching result. A Permalloy piece is attached to the inner frame of the micro-switch assembly and a magnet layer is attached to the outer frame. The magnetic force attracting the Permalloy piece and the magnet layer allows the latching of the two frames to occur in the absence of the external applied electromagnetic force. The use of this magnetic latching mechanism allows a reduction in the use of electric current to maintain a movable frame in a micromachined structure or a micro-switch assembly in a fixed position. It provides greater mechanical and optical stability and less energy consumption. In other embodiments, additional Permalloy pieces can be added to the outer frame to increase the magnetic field, so as to further reduce the electric current necessary for latching and unlatching the frames.

Latching mechanism for optical switches

A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.

Microelectromechanical system sensor assembly

A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.

Growing community of inventors

Pasadena, CA, United States of America

Shuyun Wu