Sharp Kabushiki Kaisha Corporation

Shuuhei Tsuchimoto

Mitsuhiko Yoshikawa

Kumio Nago

Masaru Kadono

Tatsushi Yamamoto

Tersuro Muramatsu

Masatoshi Tomita

A production method for producing a high permeability alloy film which includes evaporating an alloy material composed of 1-6 wt % Al, 20-35 wt % Si, and the remainder of iron by irradiating the alloy with an electron beam, and then depositing the vapor from the alloy material onto a substrate for a predetermined time to produce an alloy film composition having a high permeability. The vapor deposition onto the substrate is preferably intercepted with the shutter until the concentration of aluminum of the vapor to be deposited has been decreased to a value between 20 and about 4 wt %.

Production method of a high magnetic permeability alloy film

A method for producing a high magnetic permeability alloy film, wherein an alloy material composed of 1-6 wt % Al, 20-35 wt % Si and the remainder of iron is irradiated with an electron beam in a vacuum deposition apparatus equipped with an electron gun, and the vapor of the alloy material is deposited on a substrate for a predetermined time to form a high magnetic permeability alloy film, comprising further a step of preventing the irregular deposition caused if the concentration of aluminum in the vapor to be deposited increases.

Production method of a high magnetic permeability film

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Nara, Japan

Shuuhei Tsuchimoto