Ngk Insulators, Inc.

Shuuhei Higashihara

Makoto Iwai

A seed crystal substrateincludes a base bodyand a plurality of rows of stripe-shaped seed crystal layersformed on the base body. An upper faceof the seed crystal layeris (11-22) plane, a grooveis formed between the adjacent seed crystal layers, and a longitudinal direction of the grooveis a direction in which a c-axis of a crystal forming the seed crystal layer is projected on the upper face. A nitride of a group 13 element is formed on the seed crystal substrate.

Seed crystal substrates, composite substrates and functional devices

Protrusionseach having a shape of a pyramid or a truncated pyramid are regularly arranged on a growing faceof a seed crystalcomposed of gallium nitride single crystal. It is formed a gallium nitride crystal layerhaving a thickness of 100 &#x3bc;m or smaller by flux method directly on the growing faceof the seed crystal.

Growing community of inventors

Nagoya, Japan

Shuuhei Higashihara