Average Co-Inventor Count = 4.61
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Industrial Technology Research Institute (3 from 9,144 patents)
3 patents:
1. 8420305 - Method and apparatus for generating periodic patterns by step-and-align interference lithography
2. 8233136 - Method and apparatus for generating periodic patterns by step-and-align interference lithography
3. 7969580 - Method and system for step-and-align interference lithography