Edwards Japan Limited

Shunsuke Takeda

Yoshiyuki Sakaguchi

A vacuum pump includes: a casing formed with an inlet port or outlet port; a stator disposed inside the casing; and a rotor enclosed in the casing and including a shaft rotatably supported on the stator, and a rotor blade formed in a cylindrical shape with a plurality of blades arranged in multiple stages on an outer circumferential portion thereof, and secured to the shaft such as to be integrally rotatable therewith. The rotor blade is provided with a rupture location control groove as a rupture location control means that locally reduces rigidity of the rotor blade to control a location where the rotor blade ruptures.

Vacuum pump, rotor, and rotor body with rupture location control means on the rotor

A vacuum pump includes a linked-type thread-groove spacer which is a structure for linking a Siegbahn pump portion and a thread-groove pump portion, and when an outlet position of a thread groove which is an exhaust channel portion of this linked-type thread-groove spacer is in a vicinity of the stator portion (stator bolt) of the stator column, conductance of the exhaust channel is lowered. Thus, phases in a circumferential direction of installation positions of a thread ridge of the linked-type thread-groove spacer and the stator portion of the stator column are aligned as much as possible. In other words, the thread groove of the linked-type thread-groove spacer which is the exhaust channel is provided between the installation positions of the stator portions in the circumferential direction of the stator column so that lowering of the conductance of the exhaust channel is suppressed.

Growing community of inventors

Chiba, Japan

Shunsuke Takeda