Tokyo Electron Limited

Shunsuke Mizukami

Daisuke Hayashi

Akira Koshiishi

Jun Hirose

Takehiro Ueda

Kaoru Oohashi

Ryuji Ohtani

Jun Ooyabu

Nobuyuki Okayama

Masaaki Miyagawa

Takashi Yamamoto

Hideaki Tanaka

Wataru Shimizu

Tomonori Miwa

Toshikatsu Wakaki

Kimlhiro Higuchi

A plasma processing apparatus includes a processing chamber; a lower electrode provided in the processing chamber and having a base made of a conductive metal to which a high frequency power is applied, the lower electrode also serving as a mounting table for mounting thereon a target substrate; an upper electrode provided in the processing chamber to face the lower electrode; and a focus ring disposed above the lower electrode to surround the target substrate. An electrical connection mechanism is provided between the base of the lower electrode and the focus ring to electrically connect the base of the lower electrode to the focus ring through a current control element, and generates a DC current in accordance with a potential difference.

Plasma processing apparatus and semiconductor device manufacturing method

Focusing ring

A focus ring and a plasma processing apparatus capable of improving an in-surface uniformity of a surface and reducing occurrences of deposition on a backside surface of a peripheral portion of a semiconductor wafer compared to a conventional case are provided. Installed in a vacuum chamber is a susceptor for mounting the semiconductor wafer thereon and a focus ring is installed to surround the semiconductor wafer mounted on the susceptor. The focus ring includes an annular lower member made of a dielectric, and an annular upper member made of a conductive material and mounted on the lower member. The upper member includes a flat portion which is an outer peripheral portion having a top surface positioned higher than a surface to be processed of the semiconductor wafer W, and an inclined portion which is an inner peripheral portion inclined inwardly.

Focus ring and plasma processing apparatus

Absorption board for an electric chuck used in semiconductor manufacture

Growing community of inventors

Nirasaki, Japan

Shunsuke Mizukami