Hitachi-high-technologies Corporation

Canon Kabushiki Kaisha

Hitachi, Ltd.

Shunichi Watanabe

Takashi Onishi

Hideo Todokoro

Mitsugu Sato

Takeshi Okazaki

Tadashi Otaka

Koichi Omata

Ryo Shimamura

Hirotaka Miyazaki

Masanori Gunji

Minoru Kaneda

Goroku Shimoma

Tadanori Takahashi

Masahiro Kawawa

Terumichi Nishino

Tsutomu Abe

Tadashi Fujieda

Mikio Ichihashi

Hisaya Murakoshi

Makoto Okai

Kishio Hidaka

Mitsuo Hayashibara

Kuniyasu Nakamura

Keiji Tamura

An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus

In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.

Charged particle beam radiation apparatus

The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.

Electron gun

The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

Field emission electron gun and electron beam applied device using the same

A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.

Method and scanning electron microscope for measuring width of material on sample

The present invention provides a scanning transmission electron microscope which is capable of setting an acceptance angular range of an energy loss spectrometer independent of an acceptance angular range of a scattered electron detector, and makes it unnecessary to change a condition for the energy loss spectrometer with respect to a change in the acceptance angular range of the scattered electron detector. In such a scanning transmission electron microscope equipped with the energy loss spectrometer, a first rotationally symmetric type magnetic lens for setting an acceptance angle of an electron scattered by a specimen is disposed above the scattered electron detector for detecting the electron, a second rotationally symmetric type magnetic lens is disposed between the scattered electron detector and the energy loss spectrometer, the first rotationally symmetric type magnetic lens sets the acceptance angle of the scattered electron, and the second rotationally symmetric type magnetic lens sets an object point of the energy loss spectrometer.

Scanning transmission electron microscope and electron energy loss spectroscopy

Method and scanning electron microscope for measuring dimension of material on sample

A method for manufacturing an ink jet recording head, which is provided with a first base plate having energy generating elements, a second base plate having grooves for forming ink flow paths corresponding to the energy generating elements, and a discharge port forming member for forming discharge ports for discharging ink. The method includes the steps of forming the discharge ports by irradiating the discharge port forming member with laser light reflected from the groove wall faces, and direct laser light, and forming the flow paths by bonding the base plate and the second base plate with the grooves inside.

Method of manufacturing an ink jet recording head

An ink jet recording head includes a substrate having an element surface provided with energy generating elements, a ceiling plate provided with a grooved surface having grooves to become ink passages, the grooved surface and the element surface being bonded to form the ink passages, a base plate for supporting the substrate from the side opposite the element surface, and an ink supply member in contact with the base plate at a contact portion and having an ink flow path wall face to be communicated with the ink passage. The base plate and the ink supply member pinch the substrate and the ceiling plate at the contact portion as a fulcrum so as to enable the base plate to press the substrate from the side opposite the element surface, and the ink supply member to press the ceiling plate from the side opposite the grooved surface.

Ink jet recording head having substrate and ceiling plate base pressed together by base plate and ink supply member

Growing community of inventors

Hitachinaka, Japan

Shunichi Watanabe