Fanuc Corporation

Shunichi Odaka

Isao Kariya

Keisuke Imai

Tetsuro Sakano

Akira Nishioka

Mitsuyuki Taniguchi

Takahiro Iwatake

Hirosato Yoshida

Miaomiao Wang

A displacement detection type force sensor, having a mechanism for relaxing deformation of a member due to a factor other than an external force. The force sensor has at least one of: a first relaxation part elastically deformable along a plane perpendicular to a first axis, and provided to at least one of a first substrate part, a first connection part, a second substrate part and a second connection part; and a second relaxation part elastically deformable along the first axis, and provided to at least one of the second substrate part, the second connection part, a third substrate part and a third connection part.

Displacement detection type force sensor

A displacement detection type six-axis force sensor. The force sensor includes a first end portion; a second end portion; an intermediate portion; a first connecting portion elastically connecting the first end portion to the intermediate portion with first three-degrees of freedom; a second connecting portion elastically connecting the second end portion to the intermediate portion with second three-degrees of freedom; a first detecting part detecting relative displacement between the first end and intermediate portions, accompanied by elastic deformation of the first connecting portion; and a second detecting part detecting relative displacement between the second end and intermediate portions, accompanied by elastic deformation of the second connecting portion. The intermediate portion and the first and second connecting portions are disposed such that a force applied to the first or second end portion is applied to both of the first and second connecting portions without propagating through the intermediate portion.

Displacement detection type six-axis force sensor

A displacement detection type force-detection structure. The force-detection structure includes a first end portion; a second end portion; a connecting portion elastically connecting the first and second end portions with three degrees of freedom; a detecting part detecting relative displacement between the first and second end portions accompanied by elastic deformation of the connecting portion. The detecting part includes a first differentially-detecting section detecting a relative movement between the first and second end portions along a first axis as first movement data by using signals reverse in phase; a second differentially-detecting section detecting a relative movement between the first and second end portions along a second axis as second movement data by using signals reverse in phase; and a third differentially-detecting section detecting a relative rotation between the first and second end portions about a central axis along a third axis as rotation data by using signals reverse in phase.

Displacement detection type force-detection structure and displacement detection type force sensor

A rotation angle detector comprises a rotating body including a plurality of track parts, and an abnormality detecting unit for detecting an abnormality based on signals generated in detection units. The detection units generate a first signal based on a first track part and a second signal based on a second track part. The abnormality detecting unit includes a judgement unit for judging an occurrence of an abnormality when the difference between the fluctuation range of the first signal and the fluctuation range of the second signal is larger than a predetermined fluctuation range judgement value.

Rotation angle detector which can detect entry of foreign substances

An optical encoder of the present invention includes a light-receiving element unit, moving slitand fixed slit. The light-receiving element unitincludes a patternB for detecting infiltration of liquid.

Encoder that detects infiltration of liquid by light

A method for bonding components to each other according to this invention bonds, to a plate-shaped member or a shaft, an ultraviolet-curable adhesive cured by irradiation with ultraviolet rays and a wavelength conversion element which emits ultraviolet rays by irradiation with X-rays. The plate-shaped member is brought into contact with the shaft through a bonding layer formed by the ultraviolet-curable adhesive and the wavelength conversion element. The X-rays are transmitted through the plate-shaped member or the shaft to the bonding layer located between the plate-shaped member and the shaft to cure the ultraviolet-curable adhesive.

Method for bonding components by using energy ray-curable adhesive

A rotation angle detection apparatus includes a rotator having a track unit to detect the rotation angle of a rotation axis; a detection unit disposed in correspondence with the track unit; a rotation angle calculation unit for calculating the rotation angle of the rotation axis based on signals generated by the detection unit; a rotation speed calculation unit for calculating the rotation speed of the rotation axis; and an abnormality detection unit for detecting an abnormality. The abnormality detection unit includes a frequency analyzing unit for calculating the frequency characteristic of the signals; a storage unit for storing the number of the signals per revolution of the rotator; a signal frequency calculation unit for calculating a signal frequency; and a determination unit for detecting the abnormality in the detection apparatus, when the frequency characteristic includes a component of a higher order than the signal frequency.

Rotation angle detection apparatus having function of detecting entry of foreign substance based on frequency characteristic of signals

An optical encoder includes a light emitting part for emitting light, a stationary slit part and a rotational slit part which allow part of the light emitted from the light emitting part to pass therethrough, a light receiving part for detecting the light passing through the stationary slit part and the rotational slit part, and a support for supporting the stationary slit part. The stationary slit part includes a patterned portion in which a plurality of slits for allowing light to pass therethrough are formed, a fixed portion fixed to the support, and an elastic structure which is elastically deformable and provided between the patterned portion and the fixed portion.

Optical encoder including stationary slit part having elastic structure

A rotor () includes a first cylindrical portion (), and a second cylindrical portion () including a first partial circumferential surface () having a width narrower than that of the first cylindrical portion () in the circumferential direction, and a second partial circumferential surface () having a radius smaller than a radius of the first partial circumferential surface; the rotor, further, including a first to-be-detected portion having a plurality of teeth (), and a second to-be-detected portion having at least one tooth (), and wherein the at least one tooth of the second cylindrical portion and the tooth of the first cylindrical portion corresponding to the at least one tooth are formed in one operation by machining.

Rotation detector and method of producing a rotor in the rotation detector

A magnetic encoder including an object to be detected, a casing opposite to the object, a magnet and a magnetic sensor accommodated in the casing is provided. The casing of the magnetic encoder has an opposite wall opposite to the object. The opposite wall has a thickened portion and a thin portion integrally formed with the thickened portion. The thin portion has a smaller thickness than the thickened portion. The magnetic sensor is situated at the thin portion.

Magnetic encoder having thin detection surface

A film-like electrode member, used as a stationary member or a movable member of an electrostatic motor. The film-like electrode member is provided with an insulating substrate including a major surface and a back surface opposite to the major surface; a plurality of electrodes arranged along the major surface of the insulating substrate at predetermined intervals; a main section including at least a part of the plural electrodes and of the insulating substrate carrying the electrodes; a locally thick section integrally joined to the main section and having a thickness larger than the main section; and a conducting element formed on the thick section and connected to the plurality of electrodes. The thick section includes a protrusion element having insulating properties and locally protruding from the major surface of the insulating substrate; and the conducting element is formed continuously on the insulating substrate and the protrusion element. The major surface of the insulating substrate of a first film-like electrode member is disposed to be opposed to the back surface of the insulating substrate of a second film-like electrode member, and the thick section of the first film-like electrode member and the thick section of the second film-like electrode member is brought into abutment with each other.

Film-like electrode member with local thick section for assembling and positioning purposes, and electrostatic motor having the same

An electrostatic motor provided with a stationary member including a first major surface and a first back surface opposite to the first major surface; and a movable member including a second major surface and a second back surface opposite to the second major surface, the movable member being arranged to be movable relative to the stationary member in a condition where the second major surface is opposed to the first major surface of the stationary member. The electrostatic motor includes a protuberance provided to project from at least one of the first major surface of the stationary member and the second major surface of the movable member, for ensuring a predetermined clearance between the first major surface and the second major surface. The electrostatic motor may include a plurality of stationary members and a plurality of movable members, assembled with each other in a manner as to alternately arrange the stationary members and the movable members. In this arrangement, the electrostatic motor may further include a back-side protuberance provided to project from at least one of the first back surface of each of the stationary members and the second back surface of each of the movable members, for ensuring a predetermined clearance between the first back surface and the second back surface.

Electrostatic motor with clearance maintaining structure

An electrostatic motor includes a stator electrode member () and a slider electrode member (). The stator electrode member () and the slider electrode member () are provided with drive electrode patterns (), and the drive electrode patterns are covered by cover films (). Surfaces of the stator electrode member () and the slider electrode member () contacting each other are provided with a plurality of minute projections (). A clearance between the stator electrode member and the slider electrode member is maintained by the contact of the projections. The projections () may also be provided on only one of the stator electrode member () and the slider electrode member (), with the other electrode member having a flat surface.

Electrostatic motor including projections providing a clearance between stator and slider electrode members

Stator and slider film electrodes () are integrally provided with spacer members (). The spacer member is bonded to one end of a base film () on which different phase electrode elements () are disposed. After this, cover films () are bonded to the two surfaces of the base film on which the spacer member is bonded to obtain a spacer-equipped film electrode.

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Yamanashi, Japan

Shunichi Odaka