Ferrotec Material Technologies Corporation

Shunichi Eto

Wataru Yamagishi

Kazumasa Mori

Osanobu Fukuo

Kiyotaka Saitou

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrOand/or SiN: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10to 5.0×10/° C., is excellent in low electrostatic properties (10to 10Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.

Ceramic, probe guiding member, probe card, and socket for package inspection

A ceramic contains, in mass percent: SiN: 20.0 to 60.0%, ZrO: 25.0 to 70.0%, and one or more oxides selected from MgO, YO, CeO, CaO, HfO, TiO, AlO, SiO, MoO, CrO, CoO, ZnO, GaO, TaO, NiO, and VO: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.

An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.

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Tokyo, Japan

Shunichi Eto