Mitsubishi Denki Kabushiki Kaisha

Shungo Tsuboi

Hajime Nakatani

Haruhiko Nagai

Kenyu Haruta

Tadao Minagawa

Yoshihiko Yamamoto

Yoshifumi Matsushita

Taketoshi Takemura

Takashi Eura

At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

Excimer laser device

Growing community of inventors

Amagasaki, Japan

Shungo Tsuboi