Ulvac, Inc.

Sanyo Electric Co., Ltd.

Shuji Osono

Masaki Shima

Kazuhiro Honda

Masanori Hashimoto

Hideaki Zama

Shin Asari

Hideyuki Ogata

Satohiro Okayama

Motohide Kai

Yoshinori Wakamiya

A catalytic chemical vapor deposition apparatus comprising a catalyst wire including a tantalum wire and a boride layer formed on a surface of the tantalum wire is used. The boride of the metal tantalum (tantalum boride) is harder than the metal tantalum. Therefore, by using the tantalum wire having the boride layer formed on the surface thereof as a catalyst wire, it is possible to reduce thermal expansion of the catalyst wire, improve mechanical strength, and prolong the service life. Further, by performing energization heating of the catalyst wire by continuous energization, it is further possible to prolong the service life of the catalyst wire.

Deposition method and method of manufacturing a catalyst wire for a catalytic chemical vapor deposition apparatus

A radiological image conversion panel, having a phosphor layer containing therein a fluorescent substance which emits light through radiation exposure, is manufactured by forming the fluorescent substance into respective columnar structures on one of surfaces of a substrate to thereby obtain a phosphor layer made up of a group of columnar structures. The panel is subsequently manufactured by forming reflection films by respectively covering an outer surface of each of the columnar structures with a reflection film while leaving a gap between respective adjoining columnar structures, the reflection film being arranged to reflect light of a predetermined wavelength. In case a refractive index of the gap is lower than a refractive index of the columnar structures, the reflection films are formed of an inorganic material having a higher refractive index than the refractive index of the columnar structures.

Method of manufacturing radiological image conversion panel and radiological image conversion panel

In a catalytic CVD equipment, a holder includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire toward the side of the substrate.

Catalytic CVD equipment, method for formation of film, process for production of solar cell, and substrate holder

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Sammu, Japan

Shuji Osono