Sanyo Electric Co., Ltd.

Shuji Osawa

Shinichi Saeki

Yoshiaki Ohbayashi

Toshiyuki Ohkoda

Shigeaki Okawa

Mamoru Yasuda

First, a stationary electrode layer is formed over a semiconductor substrate and an integrated network is composed in a circuit element area around the stationary electrode layer by electrode wiring forming each circuit element. A spacer is arranged on a passivation film in plural places. A dummy island is formed in an area between the circuit element area and the stationary electrode layer area. Supply potential Vcc is applied to the dummy island and ground potential GND is applied to a P -type separated area.

Semiconductor device

A stationary electrode layer is formed on a semiconductor substrate and a vibrating diaphragm is disposed on spacers The vibrating diaphragm is placed so as to protrude from an end of the semiconductor substrate and terminal pads to are placed with being exposed from the vibrating diaphragm

Semiconductor device and semiconductor electret condenser microphone

A stationary electrode layer is formed on a semiconductor substrate , and a vibrating diaphragm is disposed on spacers . The vibrating diaphragm is placed so as to protrude from an end of the semiconductor substrate , and terminal pads to are placed with being exposed from the vibrating diaphragm

Method of producing semiconductor electret condenser microphone

A fixed electrode layer is formed on a semiconductor substrate . A vibrating film is formed on the fixed electrode layer through a spacer . Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal

Growing community of inventors

Osaka, Japan

Shuji Osawa