Fuji Photo Film Company, Limited

Fujitsu Corporation

Fujistu Limited

Shuji Koike

Yoshiaki Sakamoto

Tomohisa Shingai

Seigen Otani

Toshihiko Osada

Tomohisa Mikami

Masatoshi Kimura

Kazuaki Kurihara

Kunihiko Sato

Sachio Sasaki

Masayuki Sasaki

Jun Kodama

Tomoyuki Akahoshi

Nobuyuki Tanaka

Motomichi Shibano

Koichi Oikawa

Shino Sakai

Akihiko Ishii

A manufacturing method for a multi-nozzle ink jet head using piezoelectric elements. The head has a nozzle member in which a plurality of nozzles are formed, a pressure chamber wall member in which a plurality of pressure chambers are formed, and piezoelectric type actuators that have a diaphragm and a plurality of piezo elements and apply pressure to each of the plurality of pressure chambers for ejecting ink from the nozzles. A coating member having high rigidity is provided on inner surfaces of the pressure chamber walls or on parts of the diaphragm in contact with the pressure chamber wall member, thus increasing the rigidity of the pressure chamber walls.

Method of manufacturing a multi-nozzle ink jet head

A multi-nozzle ink jet head having a diaphragm that effectively utilizes the force generated by thin-film piezoelectric elements is disclosed. The head () has a head substrate () in which are formed a plurality of nozzles () and a plurality of pressure chambers (), a multi-layer diaphragm (--), piezoelectric elements (), and individual electrodes (). By making the thickness of the common electrode layer (-) of the multi-layer diaphragm be thin but such that problems do not occur during multi-pin driving, optimization of the rigid layer becomes possible, and hence it is possible to use the force generated by the thin-film piezoelectric elements efficiently in ink ejection.

Multi-nozzle ink jet head

A multi-nozzle ink jet head using piezoelectric elements and a manufacturing method thereof are disclosed. A head () has a nozzle member () in which a plurality of nozzles () are formed, a pressure chamber wall member () in which a plurality of pressure chambers () are formed, and piezoelectric type actuators that have a diaphragm () and a plurality of piezo elements () and apply pressure to each of the plurality of pressure chambers for ejecting ink from the nozzles. A rigid coating member () is provided on inner surfaces of the pressure chamber walls or on parts of the diaphragm in contact with the pressure chamber wall member, thus increasing the rigidity of the pressure chamber walls.

Multi-nozzle ink jet head and manufacturing method thereof

A multi-nozzle ink jet head formed through semiconductor processes. The multi-nozzle head has a head substrate in which are formed a plurality of nozzles and a plurality of pressure chambers, a diaphragm that acts as a common electrode and covers the plurality of pressure chambers, piezoelectric body layers that are provided in correspondence with the pressure chambers on the diaphragm, and individual electrode layers that are provided on the piezoelectric body layers and have individual electrode parts corresponding to the pressure chambers and wiring parts for the individual electrode parts. By interposing a low-dielectric-constant layer or an insulating layer in the region of the wiring parts, or not disposing the common electrode in the region of the wiring parts, the electrical capacitance of the driving parts is reduced, and hence a driving lag is prevented from occurring, and moreover unwanted vibration of the piezoelectric bodies is prevented.

In a method of manufacturing a multi-nozzle ink jet head having a plurality of nozzles, cross talk between adjacent elements is suppressed. The head has the nozzles (), pressure chambers (), and bimorph drivers. The bimorph drivers have piezos () formed on a diaphragm (). The diaphragm () has linear parts (-) that convert the generated force from the piezos () into displacement, and non-linear parts (-) that are provided between the linear parts (-) and diaphragm fixing parts. Due to the non-linear parts (-), transmission of strain energy to the fixing parts is suppressed, and hence cross talk is suppressed.

A multi-nozzle ink jet head formed by semiconductor processes is disclosed. The multi-nozzle head has a nozzle plate () in which are formed a plurality of nozzles (), an FPC () in which are formed a plurality of ink chambers (), and energy generating layers (), and wiring patterns (A,B) for the energy generating layers are provided on the FPC (), thus making connection to external circuitry easy.

A printer having a plurality of nozzles each for discharging ink supplied from an ink supply part () comprises a head main body () including a plurality of pressure chambers each provided for each of the nozzles and filled up with ink, a plurality of pressurizers each provided for each of the pressure chambers for pressurizing the pressure chamber to discharge the ink in the pressure chamber through the nozzle and ink supply passages for supplying the ink from the ink supply part () to the plurality of pressure chambers, and a joint section () protruded from the head main body () for joining the ink supply part () to the head main body (). The head main body () is formed on a substrate, and the substrate is partially removed from the head main body () so that a common ink passage is formed in the substrate for making communications between the ink supply passages and ink supply ports () of the ink supply part () while the joint section () is formed as a residual portion of the substrate on the head main body (). This improves the degree of integration of an ink jet head to achieve the size reduction of the ink jet head, and enhances the rigidity thereof.

Method of manufacturing an ink jet head having a plurality of nozzles

In a multi-nozzle ink jet head having a plurality of nozzles, cross talk between adjacent elements is suppressed. The head has the nozzles (), pressure chambers (), and bimorph drivers. The bimorph drivers have piezos () formed on a diaphragm (). The diaphragm () has linear parts (-) that convert the generated force from the piezos () into displacement, and non-linear parts (-) that are provided between the linear parts (-) and diaphragm fixing parts. Due to the non-linear parts (-), transmission of strain energy to the fixing parts is suppressed, and hence cross talk is suppressed.

A multi-nozzle ink jet head formed by semiconductor processes is disclosed. The multi-nozzle head has a nozzle plate ( ) in which are formed a plurality of nozzles ( ), an FPC ( ) in which are formed a plurality of ink chambers ( ), and energy generating layers ( ), and wiring patterns ( A, B) for the energy generating layers are provided on the FPC ( ), thus making connection to external circuitry easy.

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Setagaya, Japan

Shuji Koike