Nuflare Technology, Inc.

Shuichiro Fukutome

Shuichi Tamamushi

Kiyoshi Hattori

Hayato Kimura

Tomoyuki Horiuchi

Takuya Matsukawa

Tateki Watanabe

A charged-particle beam drawing apparatus has an airtight first elastic tube that is provided on an outer surface of the vacuum chamber and communicates with an inner space of the vacuum chamber, a vibrator that is airtight and provided at an end of the first elastic tube at an opposite side to the vacuum chamber, and communicates with an inner space of the first elastic tube, a second elastic tube that is airtight and provided at an end of the vibrator at an opposite side to the first elastic tube and communicates with an inner space of the vibrator, a terminal closer that is provided at an end of the second elastic tube at an opposite side to the vibrator, and closes the end of the second elastic tube, and a gap holder to keep a gap between the outer surface of the vacuum chamber and the terminal member.

Charged-particle beam drawing apparatus and vibration damping mechanism

A move mechanism for horizontally moving a target object in an accelerating manner, includes a moving unit configured to be horizontally moved in an accelerating manner, a plate part arranged on the moving unit and supported by the moving unit at a substantially center-of-gravity height position, and a mirror part configured to reflect a laser beam for measuring a position, the mirror part being connected to the plate part such that a center-of-gravity height position of the mirror part is arranged at the substantially center-of-gravity height position of the plate part.

Move mechanism for moving target object and charged particle beam writing apparatus

A charged particle beam pattern writing apparatus in accordance with one preferred form of this invention includes an atmospheric pressure measuring unit which measures the value of an atmosphere air pressure, a coordinate value corrector which corrects three-dimensional (3D) coordinate values by use of the value of the air pressure measured, a deflection amount computing unit which calculates the deflection amount of a charged particle beam by using the 3D coordinate values corrected, an irradiator for irradiation of the charged particle beam, and a deflector for deflection of the charged particle beam based on the deflection amount.

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Shizuoka, Japan

Shuichiro Fukutome