Jeol Ltd.

Oki Electric Industry Co., Ltd.

Shuichi Yuasa

Kazuki Yagi

Takeo Sasaki

Masashi Shimizu

Kiyoshi Yamanaka

Takahisa Kawamura

Ichiro Onishi

There is provided a transport device capable of reducing drifting of a sample. The transport device delivers a cartridge to a sample holder in a charged particle beam system. The transport device has a mounting portion to which the cartridge can be detachably mounted, a shaft portion providing support of the mounting portion, a resilient member connecting together the shaft portion and the mounting portion, and a drive mechanism for moving the mounting portion.

Transport device and charged particle beam system

There is provided a sample holder which is for use in a charged particle beam system and which can prevent damage to a sample stage during transportation of a cartridge. The sample holder includes: the cartridge having the sample stage for holding a sample therein; and a holder base having a mounting portion to which the cartridge can be mounted. The cartridge has: a tilt mechanism for tilting the sample stage; and a lock lever which, when the cartridge has been taken out from the mounting portion, makes contact with the sample stage and limits tilt of the stage.

Sample holder and charged particle beam system

There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.

Provided is a charged particle beam system capable of reducing the force applied to a sample when a chuck device grips the sample. The charged particle beam system is typified by an electron microscope including a sample chamber, a sample exchange chamber connected to the sample chamber, a sample container capable of being removably attached in the sample exchange chamber, and a transport device for transporting the sample between the sample container and the sample exchange chamber. The transport device includes the chuck device for gripping the sample, a drive mechanism for moving the chuck device in a given direction, a mechanical driver for actuating the chuck device, and a power transmission mechanism for transmitting power of the mechanical driver to the chuck device. The power transmission mechanism includes a shaft and a resilient member that elastically deforms when a force in the given direction is applied to the shaft.

Charged particle beam system

A cash processing device according to the present invention includes plural banknote storage sections, a storage status manager, and a display controller. The plural banknote storage sections store banknotes. The storage status manager manages a storage status in each of the banknote storage sections. According to the storage status in each of the banknote storage sections, the display controller displays a display screen to suppress a specific transaction from out of plural transaction types and/or to encourage a transaction other than the specific transaction from out of the plural transaction types.

Cash processing device and server

A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

Sample holder and electron microscope

An actuator capable of reducing vibrations of its output shaft is offered. The actuator () includes an electric motor (), a ball spline () of finite stroke length, and a nut (). The ball spline () has a shaft () provided with rolling grooves () which are formed along the axis of the spline and along which balls () can roll. An external thread () is formed on the shaft (). The nut () has an internal thread () with which the external thread () threadedly mates, and operates to transmit the rotary force of the motor () into the shaft ().

Actuator, sample positioning device, and charged particle beam system

A sample introduction device () is adapted to introduce a sample (S) into the sample chamber () of a charged particle beam instrument. The device includes: a pre-evacuation chamber () for performing a pre-evacuation; a sample holder () having a sample holding portion () capable of holding the sample (S); a support portion () for supporting the sample holder (); mechanical drives (); and goniometer () for moving and rotating the support portion () such that the sample holding portion () moves from inside the pre-evacuation chamber () into the sample chamber (). Partition valve () can be activated by the action of the goniometer.

Sample introduction device and charged particle beam instrument

An automated transaction apparatus is disclosed, which includes an identification section that, when a plurality of types of currency having mutually different currency units have been inserted, identifies the inserted currency; and a controller that effects control of a transaction with a user based on identification results determined by the identification section.

Growing community of inventors

Tokyo, Japan

Shuichi Yuasa