The Japan Steel Works, Ltd.

Shuichi Uryu

Suk-Hwan Chung

Junichi Shida

A first mirror () that can be located at a reflection position (I) at which an optical path is blocked and a laser beam (a) is reflected, and a second mirror () that reflects the laser beam (a) which is reflected by the first mirror () are disposed between the condenser lens () and the object to be irradiated (). The first mirror () is located at the reflection position (I) so that the laser beam (a) that is transmitted through the condenser lens () is sequentially reflected by the first and second mirrors (and), and an intensity of the laser beam (a) that is again reflected by the first mirror () is made to coincide with an intensity of the laser beam (a) that is reflected from the object to be irradiated (), and the condenser lens () is heated in the same manner that the processing laser beam (a) is transmitted through the condenser lens () and irradiated on the object to be irradiated ().

Laser irradiating method including maintaining temperature of a lens

Because a focal distance of a condenser lens is changed due to a change in temperature, when irradiation of a laser beam is restarted after the irradiation has stopped, it takes a long time to restore a temperature of the cooled lens to a given temperature, and the operating efficiency is deteriorated. A first mirrorthat can be located at a reflection position I at which an optical path is blocked and a laser beam a is reflected, and a second mirrorthat reflects the laser beam a which is reflected by the first mirrorare disposed between the condenser lensand the object to be irradiated. The first mirroris located at the reflection position I so that the laser beam a that is transmitted through the condenser lensis sequentially reflected by the first and second mirrorsand, and an intensity of the laser beam a that is again reflected by the first mirroris made to coincide with an intensity of the laser beam a that is reflected from the object to be irradiated, and the condenser lensis heated in the same manner that the processing laser beam a is transmitted through the condenser lensand irradiated on the object to be irradiated

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Kanagawa, Japan

Shuichi Uryu