Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Hodogaya Chemical Co., Ltd.

Hitachi-science Systems, Ltd.

Shuichi Takeuchi

Eiko Nakazawa

Mami Konomi

Yoichiro Hashimoto

Mitsugu Sato

Haruo Watanabe

Atsushi Takane

Hisayuki Takasu

Yasuko Aoki

Tetsuya Sawahata

Kazutaka Nimura

Kazuaki Okabe

Mine Nakagawa

Atsushi Muto

Yuki Tani

Hideyuki Ishii

Mine Araki

An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device. In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.

Charged particle device and wiring method

An object of the present invention is to provide an ion milling apparatus capable of processing deposits attached to an ion gun and an ion milling method capable of processing deposits attached to an ion gun. The ion milling apparatus includes gas injection means for injecting a gas toward the ion gun, and the gas injection means included in the ion milling apparatus moves the deposits attached to the ion gun by injecting the gas toward the inside of the ion gun.

Ion milling apparatus and ion milling method

An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

Scanning electron microscope

The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.

Scanning electron microscope and sample observing method using it

A polyurethane resin composition without handling trouble is obtained by a combination of a copolyether polyol obtained by copolymerization of tetrahydrofuran and a 3-alkyl tetrahydrofuran at a mixing molar ratio of 85/15-20/80, a polyisocyanate compound and an active hydrogen atom-containing compound. The 3-alkyl tetrahydrofuran is preferably 3-methyl tetrahydrofuran.

Polyurethane from a copolyether of tetrahydrofuran and 3-alkyl

Growing community of inventors

Tokyo, Japan

Shuichi Takeuchi