Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,307 patents)
2 patents:
1. 9120120 - Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium
2. 8851092 - Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium