Hirata Corporation

Shuichi Komuro

Yoichi Hirasawa

Hideo Sakamoto

A tray transport apparatus comprises a reception portion configured to receive a container configured to accommodate a stack formed by stacking a plurality of trays, an accommodation portion configured to accommodate the stack, the accommodation portion being disposed above the reception portion, a transfer unit configured to lift the stack from the container to separate the stack from the container and transfer the stack to the accommodation portion, and a transport unit configured to unload a tray located at a lowermost portion of the stack accommodated in the accommodation portion.

Tray transport apparatus and transfer system

A distorted substrate is positioned in a predetermined position and corrected, thereby improving the substrate transfer efficiency. A transport unit capable of transporting and positioning a substrate includes a transport mechanism for transporting the substrate to an unloading position, and a positioning mechanism for positioning the substrate in the unloading position. The positioning mechanism includes a regulating member including at least two pairs of regulating portions capable of abutting against the opposing end faces of the substrate, an abutment moving mechanism for moving one regulating portion toward the other regulating portion in each of the at least two pairs of regulating portions, and a regulation moving mechanism capable of moving the regulating member in a direction in which the substrate is pressed.

Transport unit, transfer apparatus, and transfer method

A holding nozzle sucking and holding a work by a negative pressure, comprising: a sucking member; a supporting member; and a biasing member, wherein the supporting member includes a first stop portion and a second stop portion for respectively defining a forward limit and a backward limit of the forward-and-backward movement of the sucking member.

Holding nozzle, holding unit, and transporting apparatus

This invention provides a transfer method of transferring, from a carrier including a placing portion on which a substrate is placed, and a cover that is superposed on the upper surface of the placing portion in close contact, the substrate held between the placing portion and the cover. The transfer method includes a holding step of holding the substrate and the cover on the placing portion by a holding apparatus, and a moving step of moving the holding apparatus to move the substrate and the cover from the placing portion to a transfer destination. In the holding step, the cover is held by the cover holding unit of the holding apparatus, and the substrate is held by the substrate holding unit of the holding apparatus in parallel postures of the cover and substrate.

Growing community of inventors

Kumamoto, Japan

Shuichi Komuro